Fluoromethane
|  | |||
| Names | |||
|---|---|---|---|
| IUPAC name Fluoromethane | |||
| Other names Freon 41 Methyl fluoride | |||
| Identifiers | |||
| 3D model (JSmol) | |||
| Abbreviations | R41 | ||
| 1730725 | |||
| ChEBI | |||
| ChEMBL | |||
| ChemSpider | |||
| ECHA InfoCard | 100.008.907 | ||
| EC Number | 
 | ||
| 391 | |||
| KEGG | |||
| MeSH | Fluoromethane | ||
| PubChem CID | |||
| UNII | |||
| UN number | UN 2454 | ||
| CompTox Dashboard (EPA) | |||
| 
 | |||
| 
 | |||
| Properties | |||
| CH3F | |||
| Molar mass | 34.03 g/mol | ||
| Appearance | Colourless gas | ||
| Odor | pleasant, ether-like odour at high concentrations | ||
| Density | 1.4397 g/L 0.557 g/cm3 (liquid) at saturation pressure at 25 °C | ||
| Melting point | −137.8 °C (−216.0 °F; 135.3 K) | ||
| Boiling point | −78.4 °C (−109.1 °F; 194.8 K) | ||
| 1.66 L/kg (2.295 g/L) | |||
| Vapor pressure | 3.3 MPa | ||
| Hazards | |||
| GHS labelling: | |||
| Danger | |||
| H220 | |||
| P210, P377, P381, P403, P410+P403 | |||
| NFPA 704 (fire diamond) | |||
| Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). Infobox references | |||
Fluoromethane, also known as methyl fluoride, Freon 41, Halocarbon-41 and HFC-41, is a non-toxic, liquefiable, and flammable gas at standard temperature and pressure. It is made of carbon, hydrogen, and fluorine. The name stems from the fact that it is methane (CH4) with a fluorine atom substituted for one of the hydrogen atoms. It is used in semiconductor manufacturing processes as an etching gas in plasma etch reactors.
Fluoromethane (originally called "fluorohydrate of methylene") became the first organofluorine compound to be discovered when it was synthesized by French chemists Jean-Baptiste Dumas and Eugène-Melchior Péligot in 1835 by distilling dimethyl sulfate with potassium fluoride.