Tungsten hexafluoride
| Solid WF6 melting into liquid WF6 | |||
|  | |||
| Names | |||
|---|---|---|---|
| IUPAC name 
 | |||
| Identifiers | |||
| 3D model (JSmol) | |||
| ChemSpider | |||
| ECHA InfoCard | 100.029.117 | ||
| EC Number | 
 | ||
| PubChem CID | |||
| UNII | |||
| UN number | 2196 | ||
| CompTox Dashboard (EPA) | |||
| 
 | |||
| 
 | |||
| Properties | |||
| WF6 | |||
| Molar mass | 297.830 g/mol | ||
| Appearance | Colorless gas | ||
| Density | 12.4 g/L (gas) 4.56 g/cm3 (−9 °C, solid) | ||
| Melting point | 2.3 °C (36.1 °F; 275.4 K) | ||
| Boiling point | 17.1 °C (62.8 °F; 290.2 K) | ||
| Hydrolyzes | |||
| −40.0·10−6 cm3/mol | |||
| Structure | |||
| Octahedral | |||
| zero | |||
| Hazards | |||
| Occupational safety and health (OHS/OSH): | |||
| Main hazards | Toxic, corrosive; gives HF on contact with water | ||
| GHS labelling: | |||
| Danger | |||
| H301+H311, H314, H330 | |||
| P260, P264, P264+P265, P270, P271, P280, P284, P301+P316, P301+P330+P331, P302+P352, P302+P361+P354, P304+P340, P305+P354+P338, P316, P317, P320, P321, P330, P361+P364, P363, P403+P233, P405, P410+P403, P501 | |||
| NFPA 704 (fire diamond) | |||
| Flash point | Non-flammable | ||
| Safety data sheet (SDS) | ChemAdvisor | ||
| Related compounds | |||
| Other anions | |||
| Other cations | |||
| Related compounds | |||
| Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). Infobox references | |||
Tungsten(VI) fluoride, also known as tungsten hexafluoride, is an inorganic compound with the formula WF6. It is a toxic, corrosive, colorless gas, with a density of about 13 kg/m3 (22 lb/cu yd) (roughly 11 times heavier than air). It is the densest known gas under standard ambient temperature and pressure (298 K, 1 atm) and the only well characterized gas under these conditions that contains a transition metal. WF6 is commonly used by the semiconductor industry to form tungsten films, through the process of chemical vapor deposition. This layer is used in a low-resistivity metallic "interconnect". It is one of seventeen known binary hexafluorides.