Tungsten hexafluoride

Tungsten hexafluoride
Solid WF6 melting into liquid WF6
Names
IUPAC name
  • Tungsten hexafluoride
  • Tungsten(VI) fluoride
Identifiers
3D model (JSmol)
ChemSpider
ECHA InfoCard 100.029.117
EC Number
  • 232-029-1
UNII
UN number 2196
  • InChI=1S/6FH.W/h6*1H;/q;;;;;;+6/p-6
  • F[W](F)(F)(F)(F)F
Properties
WF6
Molar mass 297.830 g/mol
Appearance Colorless gas
Density 12.4 g/L (gas)
4.56 g/cm3 (−9 °C, solid)
Melting point 2.3 °C (36.1 °F; 275.4 K)
Boiling point 17.1 °C (62.8 °F; 290.2 K)
Hydrolyzes
40.0·10−6 cm3/mol
Structure
Octahedral
zero
Hazards
Occupational safety and health (OHS/OSH):
Main hazards
Toxic, corrosive; gives HF on contact with water
GHS labelling:
Danger
H301+H311, H314, H330
P260, P264, P264+P265, P270, P271, P280, P284, P301+P316, P301+P330+P331, P302+P352, P302+P361+P354, P304+P340, P305+P354+P338, P316, P317, P320, P321, P330, P361+P364, P363, P403+P233, P405, P410+P403, P501
NFPA 704 (fire diamond)
3
0
2
Flash point Non-flammable
Safety data sheet (SDS) ChemAdvisor
Related compounds
Other anions
Other cations
Related compounds
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Infobox references

Tungsten(VI) fluoride, also known as tungsten hexafluoride, is an inorganic compound with the formula WF6. It is a toxic, corrosive, colorless gas, with a density of about 13 kg/m3 (22 lb/cu yd) (roughly 11 times heavier than air). It is the densest known gas under standard ambient temperature and pressure (298 K, 1 atm) and the only well characterized gas under these conditions that contains a transition metal. WF6 is commonly used by the semiconductor industry to form tungsten films, through the process of chemical vapor deposition. This layer is used in a low-resistivity metallic "interconnect". It is one of seventeen known binary hexafluorides.