Trichlorosilane
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| Names | |||
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| IUPAC name
trichlorosilane | |||
| Other names
silyl trichloride, silicochloroform | |||
| Identifiers | |||
3D model (JSmol) |
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| ChemSpider | |||
| ECHA InfoCard | 100.030.026 | ||
| EC Number |
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PubChem CID |
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| RTECS number |
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| UNII | |||
| UN number | 1295 | ||
CompTox Dashboard (EPA) |
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| Properties | |||
| HCl3Si | |||
| Molar mass | 135.45 g/mol | ||
| Appearance | colourless liquid | ||
| Density | 1.342 g/cm3 | ||
| Melting point | −126.6 °C (−195.9 °F; 146.6 K) | ||
| Boiling point | 31.8 °C (89.2 °F; 304.9 K) | ||
| hydrolysis | |||
| Hazards | |||
| GHS labelling: | |||
| Danger | |||
| H224, H250, H302, H314, H332 | |||
| P231, P280, P305+P351+P338+P310, P310, P370+P378 | |||
| NFPA 704 (fire diamond) | |||
| Flash point | −27 °C (−17 °F; 246 K) | ||
| 185 °C (365 °F; 458 K) | |||
| Explosive limits | 1.2–90.5% | ||
| Safety data sheet (SDS) | ICSC 0591 | ||
| Related compounds | |||
Related chlorosilanes |
Chlorosilane Dichlorosilane Dichloromethylsilane Chlorodimethylsilane Silicon tetrachloride | ||
Related compounds |
Trifluorosilane Tribromosilane Chloroform | ||
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
Infobox references | |||
Trichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.